Walter Uhl
__________________________________________

technische Mikroskopie GmbH & Co. KG

Custom Solutions

Custom Solutions

We are developing custom systems for various applications upon request.

Custom systems including for example special lenses, tube assemblies of our component system, special cross(xy) or rotary stages, lift tables, single or multiple axis stands, precision hole punches or micro assembly systems.

Our own design, manufacturing, assembly and service facilities enables us to provide you a complete system from a single supplier.

Here are some examples of customized solutions:


 

Microscopes for wafer inspection


Customized microscope for laser mark measurement on wafer

Customized microscope for laser mark measurement on wafer     Customized microscope for laser mark measurement on wafer
depth measurement by autofocus   depth measurement by interference
   objective and software analysis
Customized microscope for laser mark measurement on wafer    
• fully automatic measurement
   of depth, size and position
   

 

Custom Positioning System with Stand for OEM-Microscope

Custom Positioning System with Stand for OEM-Microscope


stable granite and iron cast stand
  with manual z-adjustment

high performance stepper motion controller
  with joystick and serial interface

 

XY Stage GT8, Rotary Stage RT5, Wafer-Chuck WC6

  • precise xy stage GT8 with 200 x 200 mm stroke

  • rotary stage RT5 with high round- and
     flat runout below 5 µm

   
wafer-chuck WC6 for 4-12" wafer   • wafer-chuck with vacuum-fixture
     for 12", 10", 8", 6" and 4" wafer

 


 

Customized confocal microscope for wafer inspection

Confocal microscope for wafer inspection


Vacuum waferchuck